New Vision System

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LED Sapphire Surfscan

FSM128
FSM128
ABOUT PRODUCT

Model No.: FSM128  (Film Stress Measurement System)

FSM 128 series offer the simplest and most widely adopted technique in film stress and wafer bow measurement.

Measures 40 data points/mm, > 10k points / 300 mm scan.

Provides 2D wafer stress map, wafer bow, etc.