Model No.: KLA-Tencor Surfscan 6220
Capable of 2" -8" wafers
Non-patterned surface Inspection System
0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards
0.02 ppm Haze Sensitivity
Refurbished to OEM specifications
488 nm 30mw ArLaser, Spot Size 90µ
Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ
Throughput 150/6" wph
Sold out.
In addition to continuing to search in the second-hand market, we also provide a new and alternative model Spruce 600L to customers. |
