Model No.: KLA-Tencor Surfscan 6420
Capable of 4" -8" wafers. Low angle optics. Non-patterned surface Inspection System.
0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards.
0.02 ppm Haze Sensitivity.
New 488 nm 30mw ArLaser, Spot Size 90µ;
Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ;
Throughput 150/6" wph
Sold out.
In addition to continuing to search in the second-hand market, we also provide a new and alternative model Spruce 600L to customers. |
