新光學量測設備

顯微鏡維修

半導體中古設備 銷售 / 維修

LED Sapphire Surfscan

KLA-Tencor Surfscan 6220
KLA-Tencor Surfscan 6220
產品解說

Model No.: KLA-Tencor Surfscan 6220

Capable of 2" -8" wafers

Non-patterned surface Inspection System

0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards

0.02 ppm Haze Sensitivity

Refurbished to OEM specifications

488 nm 30mw ArLaser, Spot Size 90µ

Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ

Throughput 150/6" wph