藍寶石晶片表面塵粒檢測儀 (LED Sapphire Surfscan)

1. 規格 ( Configuration )
Wafer size: 2”~4” 
Light source: 100W Halogen + Light fiber
Optical Resolution:  5um
Miniman inspect width: 15um
7.4K pixel 40MHz Line CCD
3.5u MTF 1X lens
50 seconds tact time @2” and less than 1000 particles / wafer
Dimension (cm) 75.5 x 62 x 72
Weight 85Kg

2. 優點 ( Advantage )
自動化檢測 , 減少人為誤差判斷   ( Auto detect and calculate the defect , reduce human mistake )
提供晶片表面缺陷數目 , 大小分佈等數據報告 ( Programmable data report )
檢測速度快 , 省時有效率 ( High throughput and accuracy )

若您對規格有需求更詳盡的說明, 歡迎與我們連絡: sales@cxsemi.com.tw.