新光學量測設備

顯微鏡維修

半導體中古設備 銷售 / 維修

LED Sapphire Surfscan

KLA-Tencor Surfscan 6420
KLA-Tencor Surfscan 6420
產品解說

Model No.: KLA-Tencor Surfscan 6420

Capable of 4" -8" wafers. Low angle optics. Non-patterned surface Inspection System.

0.12 micron Defect Sensitivity @ 95% capture, based on PSL Standards.

0.02 ppm Haze Sensitivity.

New 488 nm 30mw ArLaser, Spot Size 90µ;

Scan Frequency 170 Hz; Scan Pitch: 10,20 and 40µ;

Throughput 150/6" wph